Condensation coefficients in plasma sputtering deposition
نویسندگان
چکیده
منابع مشابه
Condensation coefficients in plasma sputtering deposition
Optical Emission Spectroscopy and Rutherford Backscattering Spectrometry are combined to determine condensation coefficients for plasma sputtering deposition. The method is applied for palladium deposition onto various substrates and condensation coefficients are found to lie between 0.4 and 0.9. PACS numbers: 81.15.Cd, 52.77.Dq Submitted to: J. Phys. D: Appl. Phys. § Corresponding author: Fax ...
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ژورنال
عنوان ژورنال: Journal of Physics D: Applied Physics
سال: 2007
ISSN: 0022-3727,1361-6463
DOI: 10.1088/0022-3727/40/7/039